Product Introduction:
The fully automatic FOUP cleaning machine is suitable for industry mainstream 12 inch FOUP/FOSB Particles and metal ion cleaning.
The equipment is equipped with a multi-level precision filtration system, effectively ensuring the cleanliness level and meeting the process requirements of class 10/100.
Equipped with various spray cleaning processes, it can achieve 360 ° cleaning, ensuring the high-precision cleaning requirements of the process.
Equipped with a vacuum drying system can improve efficiency, meet low humidity requirements, and monitor humidity in real-time. （Option）
1. Support EAP/MES/AMHS mainstream communication protocol, SECS/GEM200/300.
2. Support OHT/PGV/AGV equipment docking.
3. Comply with SEMI S2, S8/CE semiconductor manufacturing standards and certifications.

Application scope:
This equipment is mainly used for particle cleaning in semiconductor manufacturing processes such as FOUP, FOSB, and Cassette.