Product description:

FOUP Cleaner is an automatic centrifugal cleaner suitable for all types of wafer boxes (Smif Foup, Fosb, Cassette) to achieve unparalleled cleaning and drying results. Load FOUP to be cleaned, mount and fix on Chamber's central shaft, and rotate 360 degrees in a closed cleaning chamber. Particle cleaning by DI Water surface tension, mechanical force, centrifugal + hot air drying and other processes, high efficiency and quality to complete FOUP article cleaning.

Equipment features:

Up to ten cleaning process settings with wider process window;

Include automatic execution status display, fast review status and working time;

The twist detection basket tenon is not positioned for protection, reducing the damage caused by human activities;

The spindle is controlled by a servo motor to achieve stable acceleration, deceleration and numerical speed setting.

The rotary centrifugal cleaning can rotate in both positive and negative speeds, and it is easy to remove the adherent residues on the surface of the product.

Drying time is accelerated by IR baking without any water residue.

The first-class (two-fluid option) cleaning mode can effectively remove small pollutants.

The operation program PLC control can be adjusted freely according to the operation requirements, which is convenient, fast and user-friendly.

Scope of application:

This device is mainly used for Article cleaning of Foup, Fosb, Cassette in semiconductor process.